
| Specification | E-MST-XY-110X110 |
| Motor type and drive mode | 2-phase stepping motor + precision ball screw |
| Screw lead | 2mm |
| Travel | 110mm x 110mm |
| Repeatability | ≤±1.5um |
| positioning accuracy | ≤±5um(can be compensated to±2um) |
| minimum step size | 0.1um |
| Flatness [um] | ≤±4 |
| Straightness [um] | ≤±2 |
| Orthogonality [arcsec] | ≤±3 |
| Maximum speed [mm/s] | ≥30 |
| Maximum load [kg] | ≥10 |
| Structural material and surface treatment | Aluminum alloy hard anodizing |